Gang Du, Xiaoxu Kang, Jiangtao Zeng, Tao Zeng. Application of Multilayer Piezoelectric Actuator in Lithography Scanners[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922024
- Laser & Optoelectronics Progress
- Vol. 59, Issue 9, 0922024 (2022)
![Three kinds of stacking structures of multilayer piezoelectric actuators[8, 10, 13]. (a) Longitudinal stack; (b) transversal stack; (c) shear stack; (d) typical shape of multilayer piezoelectric actuators](/richHtml/lop/2022/59/9/0922024/img_01.jpg)
Fig. 1. Three kinds of stacking structures of multilayer piezoelectric actuators[8, 10, 13]. (a) Longitudinal stack; (b) transversal stack; (c) shear stack; (d) typical shape of multilayer piezoelectric actuators
![Fig. 2 Structural diagram of multilayer piezoelectric actuator of TWINSCAN NXT lithography scanner[23]](/richHtml/lop/2022/59/9/0922024/img_02.jpg)
Fig. 2. Fig. 2 Structural diagram of multilayer piezoelectric actuator of TWINSCAN NXT lithography scanner[23]
Fig. 3. Schematic of walking action of the piezoelectric actuator legs［27］
Fig. 4. Schematic of piezoelectric actuated “I-MAC” system adopted by Nikon lithography projection lens[28]
Fig. 5. Three dimensional model of X-Y direction flexible adjustment mechanism of moving mirror in lithography projection lens[29]
Fig. 6. Structural of piezoelectric driven reticle assist device[34]
Fig. 7. STACIS III piezoelectric active vibration isolator produced by TMC company of the United States[40]
Fig. 8. Structural of piezoelectric vibration isolator[43]
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