Multilayer piezoelectric actuator has the advantages of small volume, fast response, large stiffness, high displacement accuracy, and large driving force output, which is extensively utilized in the development of lithography scanners. This paper briefly introduces the basic structure and characteristics of multilayer piezoelectric actuator, and lists the typical applications of piezoelectric actuator in high-precision adjustment of projection lens of lithography scanners, positioning of reticle stage, and active vibration isolation of lithography scanners. Finally, the development direction of multilayer piezoelectric actuator is prospected.