Cunbao Lin, Shuhua Yan, Zhiguang Du, Guochao Wang, Chunhua Wei. Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer[J]. Chinese Optics Letters, 2015, 13(10): 100501
- Chinese Optics Letters
- Vol. 13, Issue 10, 100501 (2015)
Fig. 1. Schematic of the optical configuration for the proposed HGI, BS: beam splitter.
Fig. 2. Experimental setup of the optical system for the proposed HGI.
Fig. 3. Measurement result of the linear movement with a displacement of 10 mm.
Fig. 4. Measurement result of the sinusoidal movement with an amplitude of 10 μm.
Fig. 5. Measurement result of the round-trip step movement with a total displacement of 10 nm.
Fig. 6. Stability measurement results for the HGI and the XL-80 in ten minutes.
Fig. 7. Variation of the air refractive index in 3 h.
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Table 1. Measurement Results and Residual Errors of the HGI and the XL-80 for the 10 mm Displacement
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