• Chinese Optics Letters
  • Vol. 13, Issue 10, 100501 (2015)
Cunbao Lin, Shuhua Yan*, Zhiguang Du, Guochao Wang, and Chunhua Wei
Author Affiliations
  • College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
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    DOI: 10.3788/COL201513.100501 Cite this Article Set citation alerts
    Cunbao Lin, Shuhua Yan, Zhiguang Du, Guochao Wang, Chunhua Wei. Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer[J]. Chinese Optics Letters, 2015, 13(10): 100501 Copy Citation Text show less

    Abstract

    A symmetrical heterodyne grating interferometer with both a short period and high signal-to-noise ratio is proposed. It possesses good immunity to environmental disturbances and can simultaneously achieve high resolution and stability. The experimental results show that the standard deviation of 24.67 nm can be realized for the long range of 10 mm. The measurement resolution of better than 2 nm is achieved with the theoretical resolution of 12 pm. Additionally, system stability at less than ±1.5 nm is obtained in just over 10 min. The measurement errors, including cosine error, nonlinear error and non-common path error, are discussed as well.
    E0=[10]exp(iω1t)+[01]exp(iω2t),(1)

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    Ircos[(ω1ω2)t].(2)

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    Imsηs(θ)·cos[(ω1ω2)t+k(l1l+1)+(ϕ1ϕ+1)].(3)

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    Impηp(θ)·cos[(ω1ω2)t+k(l1l+1)+(ϕ1ϕ+1)],(4)

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    ϕ±1=±2πs/d,(5)

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    ϕmea=ϕnon+ϕmov=k(l1l+1)+(ϕ1ϕ+1),(6)

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    s=ϕmea4π·d.(7)

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    Cunbao Lin, Shuhua Yan, Zhiguang Du, Guochao Wang, Chunhua Wei. Symmetrical short-period and high signal-to-noise ratio heterodyne grating interferometer[J]. Chinese Optics Letters, 2015, 13(10): 100501
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