Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201
- Chinese Optics Letters
- Vol. 16, Issue 3, 031201 (2018)
Fig. 1. Schematic of multi-frequency LSI system.
Fig. 2. Original fringes and their spectra: (a) Image with three different frequency fringes; (b) high-frequency fringe; (c) mid-frequency fringe; (d) low-frequency fringe; (e)–(g) spectra corresponding to (b)–(d), respectively.
Fig. 3. Geometry of the beam path.
Fig. 4. Results and main analysis procedure.
Fig. 5. Thickness change distribution.
Fig. 6. 3D shape of the thin film subjected to a shearing force.
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