Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai; Tianyu Yuan; Hanyang Jiang; Xinxing Shao; Meiling Dai; Hai Yun; Fujun Yang; Xiaoyuan He

doi:10.3788/COL201816.031201

Journals >Chinese Optics Letters >Volume 16 >Issue 3 >Page 031201 > Article

Chinese Optics Letters
Vol. 16, Issue 3, 031201 (2018)

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai^1、2、*, Tianyu Yuan¹, Hanyang Jiang², Xinxing Shao², Meiling Dai², Hai Yun¹, Fujun Yang², and Xiaoyuan He²

Author Affiliations

¹School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China

²Department of Engineering Mechanics, Southeast University, Nanjing 210096, China

show less

DOI: 10.3788/COL201816.031201 Cite this Article Set citation alerts

Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201 Copy Citation Text

EndNote(RIS)

BibTex

Plain Text

show less

Cited By

Article index updated: Mar. 8, 2024

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.