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Journals >Chinese Optics Letters >Volume 16 >Issue 3 >Page 031201 > Article

Chinese Optics Letters
Vol. 16, Issue 3, 031201 (2018)

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

Xiangjun Dai^1、2、*, Tianyu Yuan¹, Hanyang Jiang², Xinxing Shao², Meiling Dai², Hai Yun¹, Fujun Yang², and Xiaoyuan He²

Author Affiliations

¹School of Transportation and Vehicle Engineering, Shandong University of Technology, Zibo 255049, China

²Department of Engineering Mechanics, Southeast University, Nanjing 210096, China

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DOI: 10.3788/COL201816.031201 Cite this Article Set citation alerts

Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201 Copy Citation Text

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References

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Data from CrossRef

[1] Yugang Ren, Zhang Cao, Xiaoyang Tang, Heng Xie, Lijun Xu. ??m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer. Optics Express, 27, 2899(2019).

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Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201

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