• Chinese Optics Letters
  • Vol. 16, Issue 9, 090501 (2018)
Dun Liu1、2、*, Shibin Wu1、**, Wei Yang1, Lihua Wang1, Bin Fan1, and Fan Wu1
Author Affiliations
  • 1Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/COL201816.090501 Cite this Article Set citation alerts
    Dun Liu, Shibin Wu, Wei Yang, Lihua Wang, Bin Fan, Fan Wu. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. Chinese Optics Letters, 2018, 16(9): 090501 Copy Citation Text show less

    Abstract

    The full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.
    Pj(m)2+f2f=mλ2j,(1)

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    Mi=1NAiPj(m)2i=mλ2j,(2)

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    hj=λ2j(n1).(3)

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    φ(x,y)=j=1Jφj(x,y),(4)

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    φj(x,y)={0,(x,y)locatedinoddzonesofthejthmask,2πhj(n1)λ,(x,y)locatedinevenzonesofthejthmask,(5)

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    U(ξ,η)=1iλU0(x,y)·t(x,y)·exp[ikz2+(ξx)2+(ηy)2]2[z2+(ξx)2+(ηy)2]·[z2+(ξx)2+(ηy)2+z]dxdy,(6)

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    U(ξ,η)=IFFT{FFT[U0(x,y)·t(x,y)]·H(fx+fy)},(7)

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    H(fx+fy)=FFT{exp(ikz2+x2+y2)i2λ(z2+x2+y2)·(z2+x2+y2+z)}.(8)

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    Δxλz2+L2/2L,(9)

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    U(ξ,η)=1iλs=1Saperture{rect(xxsωx+yysωy)·U0(x,y)·t(x,y)·exp[ikz2+(ξx)2+(ηy)2]2[z2+(ξx)2+(ηy)2]·[z2+(ξx)2+(ηy)2+z]dxdy.(10)

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    Dun Liu, Shibin Wu, Wei Yang, Lihua Wang, Bin Fan, Fan Wu. Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses[J]. Chinese Optics Letters, 2018, 16(9): 090501
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