[1] Guo T, Li F, Ni L F et al. Microstructure surface topography measurement based on color images of white light interferometry[J]. Acta Optica Sinica, 34, 0212003(2014).

[2] Axinte D A, Gindy N, Fox K et al. Process monitoring to assist the workpiece surface quality in machining[J]. International Journal of Machine Tools and Manufacture, 44, 1091-1108(2004).

[3] Lee H S, Shin S, Lee H et al. Determining the micro-optical element surfaces profiles using transmission deflectometry with liquids[J]. Current Applied Physics, 15, 302-306(2015).

[4] Zuluaga-Ramírez P, Frövel M, Belenguer T et al. Non contact inspection of the fatigue damage state of carbon fiber reinforced polymer by optical surface roughness measurements[J]. NDT & E International, 70, 22-28(2015).

[5] Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

[6] Shi T, Zang Z M, Liu D et al. Retrace error correction for non-null testing of optical aspheric surface[J]. Acta Optica Sinica, 36, 0812006(2016).

[7] Zhao X H, Qu X H, Ye S H et al. Optic testing methods and instruments for MEMS[J]. Optical Technology, 29, 197-200(2003).

[8] Lyu S, Nguyen D C, Kim D et al. Experimental drag reduction study of super-hydrophobic surface with dual-scale structures[J]. Applied Surface Science, 286, 206-211(2013).

[9] Lee J M, Lee S H, Ko J S. Dynamic lateral adhesion force of water droplets on microstructured hydrophobic surfaces[J]. Sensors and Actuators B: Chemical, 213, 360-367(2015).

[10] Ding S W, Zhang X H, Yu Q F et al. Overview of non-contact 3D reconstruction measurement methods[J]. Laser & Optoelectronics Progress, 54, 070003(2017).

[11] Dong Y F, Wan X J, Meng H et al. Fast and stable white light interferometry[J]. Laser & Optoelectronics Progress, 54, 051203(2017).

[12] O'Mahony C. Hill M, Brunet M, et al. Characterization of micromechanical structures using white-light interferometry[J]. Measurement Science and Technology, 14, 1807-1814(2003).

[13] Grigg D, Felkel E, Roth J et al. Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy[J]. Proceedings of SPIE, 5455, 429-435(2004).

[14] Zhou L. Study on phase shift drive and identification method of surface topography multiwavelength interferometry[D]. Wuhan: Hubei University of Technology(2018).

[15] Hata S, Hayashi J, Ishimaru I et al. Nano-level 3-D measurement system using 3-wavelength laser light interference. [C]∥2008 6th IEEE International Conference on Industrial Informatics, July 13-16, 2008, Daejeon, Korea. New York: IEEE, 10203123(2008).

[16] Kumar U P, Wang H F, Mohan N K et al. White light interferometry for surface profiling with a colour CCD[J]. Optics and Lasers in Engineering, 50, 1084-1088(2012).

[17] Shen B X, Wang W, Zhang H B. Multi-wavelength interferometry for nanometer scale spacing[J]. Optics and Precision Engineering, 13, 103-108(2005).

[18] Zhou M B, Lin D J, Guo L R et al. Error analysis on two wavelength white light phase shifting interferometry[J]. Optics and Precision Engineering, 7, 106-113(1999).

[19] Zhai Z S, Zhang Y H, Wang X Z et al. Alignment of the initial phase during multiple-wavelength switching in microscopic interferometry[J]. Optics & Laser Technology, 115, 493-499(2019).

[20] Zhou J Z, Yang M. Design of light intensity monitoring system based on ARM Cortex-M3[J]. Journal of Anqing Normal University (Natural Science Edition), 24, 69-71, 95(2018).

[21] Xing S R, Zhuang Y, Liang G H. Illumination intensity control system based on PID[J]. Computer & Digital Engineering, 38, 70-73(2010).

[22] Zhou D L, Huang D Z. Analysis of the interference fringes and adjustment of Michelson interferometer[J]. Physical Experiment of College, 21, 16-18(2008).

[23] Yu D Y, Tan H Y[M]. Engineering optics, 345-346(2011).