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Photonics Research
Vol. 5, Issue 6, 578 (2017)

Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides

Xia Chen^*, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, and Graham T. Reed

Author Affiliations

Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK

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DOI: 10.1364/PRJ.5.000578 Cite this Article Set citation alerts

Xia Chen, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, Graham T. Reed. Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides[J]. Photonics Research, 2017, 5(6): 578 Copy Citation Text

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References

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[2] Z. Yong, S. Shopov, J. C. Mikkelsen, R. Mallard, J. C. C. Mak, S. P. Voinigescu, J. K. S. Poon. Flip-chip integrated silicon Mach–Zehnder modulator with a 28 nm fully depleted silicon-on-insulator CMOS driver. Opt. Express, 25, 6112-6121(2017).

[3] M. R. Watts, J. Sun, C. DeRose, D. C. Trotter, R. W. Young, G. N. Nielson. Adiabatic thermos-optics Mach–Zehnder switch. Opt. Lett., 38, 733-735(2013).

[4] A. Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delage, B. Lamontagne, J. H. Schmid, E. Post. A silicon-on-insulator photonic wire based evanescent field sensor. IEEE Photon. Technol. Lett., 18, 2520-2522(2006).

[5] D. J. Thomson, H. Porte, B. Goll, D. Knoll, S. Lischke, F. Y. Gardes, Y. Hu, G. T. Reed, H. Zimmermann, L. Zimmermann. Silicon carrier depletion modulator with 10 Gbit/s driver realized in high-performance photonic BiCMOS. Laser Photon. Rev., 8, 180-187(2014).

[6] J. Schrauwen, D. Van Thourhout, R. Baets. Trimming of silicon ring resonator by electron beam induced compaction and strain. Opt. Express, 16, 3738-3743(2008).

[7] S. Prorok, A. Y. Petrov, M. Eich, J. Luo, A. K.-Y. Jen. Trimming of high-Q-factor silicon ring resonators by electron beam bleaching. Opt. Lett., 37, 3114-3116(2012).

[8] L. Zhou, K. Okamoto, S. J. B. Yoo. Athermalizing and trimming of slotted silicon microring resonators with UV-sensitive PMMA upper-cladding. IEEE Photon. Technol. Lett., 21, 1175-1177(2009).

[9] A. A. Canciamilla, F. Morichetti, S. Grillanda, P. Velha, M. Sorel, V. Singh, A. Agarwal, L. C. Kimerling, A. Melloni. Photo-induced trimming of chalcogenide-assisted silicon waveguides. Opt. Express, 20, 15807-15817(2012).

[10] D. Bachman, Z. Chen, R. Fedosejevs, Y. Y. Tsui, V. Van. Permanent fine tuning of silicon microring devices by femtosecond laser surface amorphization and ablation. Opt. Express, 21, 11048-11056(2013).

[11] J. J. Ackert, J. K. Doylend, D. F. Logan, P. E. Jessop, R. Vafaei, L. Chrostowski, A. P. Knights. Defect-mediated resonance shift of silicon-on-insulator racetrack resonators. Opt. Express, 19, 11969-11976(2011).

[12] G. T. Reed, M. M. Milosevic, X. Chen, D. J. Thomson. Trimming of ring resonators via ion implantation in silicon. Proc. SPIE, 10242, 102420Q(2017).

[13] R. Topley, G. Martinez-Jimenez, L. O’Faolain, N. Healy, S. Mailis, D. J. Thomson, F. Y. Gardes, A. C. Peacock, D. N. R. Payne, G. Z. Mashanovich, G. T. Reed. Locally erasable couplers for optical device testing in silicon on insulator. J. Lightwave Technol., 32, 2248-2253(2014).

[14] K. Kitahara, Y. Ohashi, Y. Katoh, A. Hara, N. Sasaki. Submicron-scale characterization of poly-Si thin films crystallized by excimer laser and continuous-wave laser. J. Appl. Phys., 95, 7850-7855(2004).

[15] P. D. Townsend. Optical effects of ion implantation. Rep. Prog. Phys., 50, 501-558(1987).

[16] P. J. Foster, J. K. Doylend, P. Mascher, A. P. Knights, P. G. Goleman. Optical attenuation in defect-engineered silicon rib waveguide. J. Appl. Phys., 99, 073101(2006).

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[18] X. Chen, M. Milosevic, D. Thomson, A. Khokhar, Y. Franz, A. Runge, S. Mailis, A. Peacock, G. Reed. Dataset for: Post-fabrication phase trimming of Mach-Zehnder interferometers by laser annealing of germanium implanted waveguides. Univ. Southampton Institutional Repository(2017).

CLP Journals

[1] Greta De Paoli, Senta L. Jantzen, Thalia Dominguez Bucio, Ilias Skandalos, Christopher Holmes, Peter G. R. Smith, Milan M. Milosevic, Frederic Y. Gardes. Laser trimming of the operating wavelength of silicon nitride racetrack resonators[J]. Photonics Research, 2020, 8(5): 677

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Xia Chen, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, Graham T. Reed. Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides[J]. Photonics Research, 2017, 5(6): 578

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