Xia Chen, Milan M. Milosevic, David J. Thomson, Ali Z. Khokhar, Yohann Franz, Antoine F. J. Runge, Sakellaris Mailis, Anna C. Peacock, Graham T. Reed. Post-fabrication phase trimming of Mach–Zehnder interferometers by laser annealing of germanium implanted waveguides[J]. Photonics Research, 2017, 5(6): 578
- Photonics Research
- Vol. 5, Issue 6, 578 (2017)
Fig. 1. Schematic illustration of the MZI with the Ge implanted waveguides in both arms and the localized annealing process using a scanning laser.
Fig. 2. Optical microscope image of the Ge implanted waveguides on both arms of the MZI.
Fig. 3. Experimental setup for laser annealing (PBS, polarization beam splitter; BS, pellicle beam splitter; MO, microscope objective).
Fig. 4. Measured results (normalized optical transmissions) of the output ports of the (a) MZI device I and (b) MZI device II while changing the annealing length of the implanted waveguide. Calculated results were also fitted and plotted correspondingly. The 10 ×
Fig. 5. Measured results (normalized optical transmissions) of the output ports of the (a) MZI device III and (b) MZI device IV while changing the annealing length of the implanted waveguide. Calculated results were also fitted and plotted correspondingly. The 20 ×
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