Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer

Yisi Dong; Peng-Cheng Hu; Haijin Fu; Hongxing Yang; Ruitao Yang; Jiubin Tan

doi:10.1364/PRJ.442057

Journals >Photonics Research >Volume 10 >Issue 1 >Page 59 > Article

Photonics Research
Vol. 10, Issue 1, 59 (2022)

Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer

Yisi Dong^1、2, Peng-Cheng Hu^1、2、*, Haijin Fu^1、2, Hongxing Yang^1、2, Ruitao Yang^1、2, and Jiubin Tan^1、2

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China

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DOI: 10.1364/PRJ.442057 Cite this Article Set citation alerts

Yisi Dong, Peng-Cheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, Jiubin Tan. Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer[J]. Photonics Research, 2022, 10(1): 59 Copy Citation Text

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