Yonggang Pan, Zheng Liu, Ben Wang, Sibao Zhang, Lü Chenrui. Research on Film Thickness Uniformity of Electron Beam Evaporation Spherical Fixture System[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0531001
- Laser & Optoelectronics Progress
- Vol. 58, Issue 5, 0531001 (2021)
Fig. 1. Parameters of the thin film thickness distribution
Fig. 2. Schematic diagram of the rotating spherical fixture
Fig. 3. Coordinate transformation of the correction mask
Fig. 4. Thin films distribution curves of different n values
Fig. 5. Distribution curve of the relative thin film thickness
Fig. 6. Shape of the correction mask
Fig. 7. Curve of the simulated thin film thickness distribution
Fig. 8. Distribution curve of the actual thin film thickness
Fig. 9. Thin films thickness distribution curves of actual measurement and theoretical simulation
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Table 1. Basic parameters of the system
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