In this paper, a mathematical model of intensity distribution in multi-beam interference field is established, and the four-beam interference light field based on the joint modulation of azimuth angle, incident angle and polarization angle is simulated by Matlab. The influence of changes in beam azimuth angle, incident angle and polarization state on multi-beam interference is analyzed, and the reason for the formation of the isolation band phenomenon in the asymmetric incident light field is explained. Based on the interference of four-beam and the combination of polarization states of s-s-s-s waves, the azimuth angle of one beam is rotated 180° and the incident angle is changed. A method for fabricating high aspect ratio elliptical array is obtained. Experimental results show that the polarization vector of the beam is determined by the azimuth angle, the incident angle and the polarization angle. Due to the introduction of two degrees of freedom of azimuth and incidence angle, the diversity of interference patterns is increased by asymmetric incidence, which makes the multi-beam interference not only limited to the preparation of periodic circular aperture array and circular dot array, but also provides theoretical reference for the preparation of multi period and trans-scale patterns.