[1] White D J. Stylus contact method for surface metrology in the ascendancy [J]. Meas. Control(S0020-2940)，1998，31(2)：48-50.
[2] Bennett J M. Recent development in surface roughness characterization [J]. Meas. Sci. Technol(S0957-0233)，1992，3(12)：1119-1127.
[3] Bennett J M，Mattsson L. Introduction to surface roughness and scattering [M]. Washington，DC，USA：Optical Society of America，1989.
[4] Hamed A M，Ei-Chandoor H，Ei-Diasty F，et al. Analysis of speckle images to assess surface roughness [J]. Optics & Laser Technology(S0030-3992)，2004，36(3)：249-253.
[5] Leonard L C，Toal V. Roughness measurement of metallic surfaces based on the laser speckle contrast method [J]. Optics and
Lasers in Engineering(S0143-8166)，1998，30(5)：433-440.
[6] WANG Xiao-xia，GUO Xiao-yun. The application of interomicroscopy in ultra-mearuring [J]. Journal of Jiamusi University：Natural Science Edition，1999，17(4)：420-424.
[7] CHANG Su-ping，XIE Tie-bang. MEMS profile measurement by white-light interferometry [J]. J. Huazhong Univ. of Sci.&Tech：Nature Science Edition，2007，35(9)：8-11.
[8] Kino G S，Chim S C. Mirau correlation microscope [J]. Applied Optics(S0003-6935)，1990，29(26)：3775-3783.
[9] GROOT D P，DECK L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain [J]. J Mod Opt(S0950-0340)，1995，42(2)：389-401.
