• Opto-Electronic Engineering
  • Vol. 38, Issue 1, 71 (2011)
LIU Chen1, CHEN Lei2, WANG Jun2, HAN Zhi-gang2, and SHI Li-li2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: Cite this Article
    LIU Chen, CHEN Lei, WANG Jun, HAN Zhi-gang, SHI Li-li. Measurement of Surface Topography by Using White-light Scanning Interferometry[J]. Opto-Electronic Engineering, 2011, 38(1): 71 Copy Citation Text show less

    Abstract

    As the laser interference microscope testing technology is only suitable for the measurement of relative altitude in surface topography testing and is not available for absolute measurement, the method by using white light interference microscope testing technology is presented. The measuring instrument based on the white light interference theory is developed, and the calibration between the pixel of CCD and PZT is carried out. The topography of the testing surface is calculated with the micro-displacement of the center of zero class white light fringe, which is located through spatial frequency-domain algorithm. The experiment is carried out, and the result shows that the method is available for measuring the topography of plane surface, bench surface, film surface and sphere surface.
    LIU Chen, CHEN Lei, WANG Jun, HAN Zhi-gang, SHI Li-li. Measurement of Surface Topography by Using White-light Scanning Interferometry[J]. Opto-Electronic Engineering, 2011, 38(1): 71
    Download Citation