• Infrared and Laser Engineering
  • Vol. 50, Issue 6, 20200403 (2021)
Ruiwen Geng1, Qiming Xie2、*, Wanqing Zhang2, Jie Kang2, Yueqing Liang2, Xiaojing Yang1, and Rui Li3
Author Affiliations
  • 1Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, China
  • 2Kunming Institute of Physics, Kunming 650233, China
  • 3Faculty of Environmental Science and Engineering, Kunming University of Science and Technology, Kunming 650500, China
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    DOI: 10.3788/IRLA20200403 Cite this Article
    Ruiwen Geng, Qiming Xie, Wanqing Zhang, Jie Kang, Yueqing Liang, Xiaojing Yang, Rui Li. Study on the material removal mechanism of ZnSe crystal via ultra-precision diamond turning[J]. Infrared and Laser Engineering, 2021, 50(6): 20200403 Copy Citation Text show less
    References

    [1] T Yang, X J Zhu, J Y Ji, et al. First-principles study of phase transition, elastic and thermodynamic properties of ZnSe at high pressure. Scientific Reports, 10, 3265(2020).

    [2] E Y Vilkova, O V Timofeev, S A Nosov, et al. Variation of the surface roughness of CVD ZnSe undergoing mechanical processing as a function of the grain size of the suspension. Journal of Optical Technology, 80, 577(2013).

    [3] L A Valdez, M A Caravaca, R A Casali. Ab-initio study of elastic anisotropy, hardness and volumetric thermal expansion coefficient of ZnO, ZnS, ZnSe in wurtzite and zinc blende phases. Journal of Physics and Chemistry of Solids, 134, 245-254(2019).

    [4] Airola M B, Thomas M E, Ma J, et al. Angle dependent scatter in CVD ZnSe single crystal CaF2 from the infrared through the NIR[C]SPIE, 2019, 10985: 1098504.

    [5] C J Brierley, C M Beck, G R Kennedy, et al. The potential of CVD diamond as a replacement to ZnSe in CO2 laser optics. Diamond and Related Materials, 8, 1759-1764(1999).

    [6] E M Gavrushchuk. Polycrystalline Zinc Selenide for IR Optical Applications. Inorganic Materials, 39, 883-899(2003).

    [7] Yanping Yao, Yulan Zhang, Changjiang Li, et al. Study on the chemical mechanica l polishing of ZnSe polycrystal. Journal of Synthetic Crystals, 35, 1378-1382(2006).

    [8] Chen Li, Feihu Zhang, Xuan Zhang, et al. Re-search progress of ductile removal mechanism for hard-brittle single crystal materials. Chinese Journal of Mechanical Engineering, 55, 181-190(2019).

    [9] J Chen, F Ding, X Luo, et al. Fundamental study of ductile-regime diamond turning of single crystal gallium arsenide. Precision Engineering, 62, 71-82(2020).

    [10] C Li, Q Zhang, Y Zhang, et al. Nanoindentation and nanoscratch tests of YAG single crystals: An investigation into mechanical properties, surface formation characteristic, and theoretical model of edge-breaking size. Ceramics International, 46, 3382-3393(2020).

    [11] C Li, F Zhang, B Meng, et al. Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing. Materials & Design, 125, 180-188(2017).

    [12] Z Shi, J Zhang, Q Zhao, et al. Transmission electron microscopy (TEM) study of anisotropic surface damages in micro-cutting polycrystalline aluminate magnesium spinel (PAMS) crystals. Ceramics International, 46, 20570-20575(2020).

    [13] C Zhang, B Guo, Q Zhao, et al. Ultra-precision grinding of AlON ceramics: Surface finish and mechanisms. Journal of the European Ceramic Society, 39, 3668-3676(2019).

    [14] M Lai, X Zhang, F Fang, et al. Effects of crys-tallographic orientation and negative rake angle on the brittle-ductile transition and subsurface deformation in machining of monocrystalline germanium. Precision Engineering, 56, 164-171(2019).

    [15] J Yan, T Asami, H Harada, et al. Crystallographic effect on subsurface damage formation in silicon microcutting. CIRP Annals, 61, 131-134(2012).

    [16] Li W, Yang K, Wang P, et al. Experimental investigation of the ultraprecision turning capability of PVD ZnSe[C]SPIE, 2016, 9683: 968319.

    [17] F Z Fang, V C Venkatesh, G X Zhang. Diamond turning of soft semiconductors to obtain nano-metric mirror surfaces. The International Journal of Advanced Manufacturing Technology, 19, 637-641(2002).

    [18] S A Shojaee, T A Harriman, Y Qi, et al. Spatial variations in stress and crystal quality in diamond turned ZnSe surfaces measured by Raman spectroscopy. Manufacturing Letters, 2, 35-39(2014).

    [19] Qingzhong Li, Weibin Shi, Mingguang Xia. Zinc Selenide crystal polishing slurry and removal mechanism in fine atomization CMP. Surface Technology, 47, 271-276(2018).

    [20] T Ohta, J Yan, S Yajima, et al. High-efficiency machining of single-crystal germanium using large-radius diamond tools. International Journal of Surface Science & Engineering, 1, 374-392(2007).

    [21] H Xiao, R Liang, O Spires, et al. Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal. Optics Express, 27, 28364(2019).

    [22] W Huang, D Yu, X Zhang, et al. Ductile-regime machining model for ultrasonic elliptical vibration cutting of brittle materials. Journal of Manufacturing Processes, 36, 68-76(2018).

    [23] M A Rahman, M Rahman, M Mia, et al. Investigation of the specific cutting energy and its effect in shearing dominant precision micro cutting. Journal of Materials Processing Technology, 283, 116688(2020).

    [24] T G Bifano, S C Fawcett. Specific grinding energy as an in-process control variable for ductile-regime grinding. Precision Engineering, 13, 256-262(1991).

    [25] O A Fedorenko, Y A Zagoruiko, N O Kovalenko. Mechanical properties of ZnSe : Cr2+ single crystals. Physics of the Solid State, 54, 2253-2255(2012).

    [26] C L He, W J Zong, J J Zhang. Influencing factors and theoretical modeling methods of surface roughness in turning process: State-of-the-art. International Journal of Machine Tools and Manufacture, 129, 15-26(2018).

    [27] J Yan, T Asami, T Kuriyagawa. Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser mi-cro-Raman spectroscopy. Precision Engineering, 32, 186-195(2008).

    [28] Z Li, X Zhang. Subsurface deformation of germanium in ultra-precision cutting: characterization of micro-Raman spectroscopy. The International Journal of Advanced Manufacturing Technology, 91, 213-225(2017).

    [29] J Yan, Z Zhang, T Kuriyagawa. Mechanism for material removal in diamond turning of reac-tion-bonded silicon carbide. International Journal of Machine Tools and Manufacture, 49, 366-374(2009).

    [30] W Huang, J Yan. Surface formation mechanism in ultraprecision diamond turning of coarse-grained polycrystalline ZnSe. International Journal of Machine Tools and Manufacture, 153, 103554(2020).

    [31] S Ono. Phase transition in ZnSe at high pressures and high temperatures. Journal of Physics and Chemistry of Solids, 141, 109409(2020).

    [32] C Pu, L Dai, H Li, et al. Pressure-induced phase transitions of ZnSe under different pressure environments. AIP Advances, 9, 25004(2019).

    [33] R E Tallman, G Lindberg, B Shih, et al. Anomalous pressure behavior of ZnSe Raman spectrum. High Pressure Research, 29, 476-481(2009).

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    [1] Chao Yang, Naiwen Zhang, Yang Bai. High-efficiency and high-quality combined polishing method of zinc selenide crystal (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220531

    Ruiwen Geng, Qiming Xie, Wanqing Zhang, Jie Kang, Yueqing Liang, Xiaojing Yang, Rui Li. Study on the material removal mechanism of ZnSe crystal via ultra-precision diamond turning[J]. Infrared and Laser Engineering, 2021, 50(6): 20200403
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