Wanlu Xie, Xiaobin Wu, Kuibo Wang, Yan Luo, Yu Wang. Effect of Different Substrate Materials on Focusing Beam Performance of EUV Collector[J]. Laser & Optoelectronics Progress, 2020, 57(17): 173401
- Laser & Optoelectronics Progress
- Vol. 57, Issue 17, 173401 (2020)
Fig. 1. Optical path of EUV collection system
Fig. 2. Simulation model of EUV collector
Fig. 3. Temperature distribution of different collecting mirror reflection surfaces. (a) Fused silica; (b) SiC; (c) AlSi
Fig. 4. Structural deformation distribution of different collecting mirror reflection surfaces. (a) Fused silica; (b) SiC; (c) AlSi
Fig. 5. Spot diagrams of collection mirror after deformation. (a) Non-deformation; (b) fused silica; (c) SiC; (d) AlSi
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Table 1. Characteristic parameters of fused silica, SiC, AlSi substrate, and Al support
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Table 2. Temperature-rise of collection mirror ellipsoidal reflecting surface℃
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Table 3. Structural deformation of collection mirror ellipsoidal reflecting surfaceμm
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Table 4. Focusing performance of different collection mirrors after deformation
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