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    Journals >Acta Optica Sinica >Volume 36 >Issue 1 >Page 105003 > Article
    • Acta Optica Sinica
    • Vol. 36, Issue 1, 105003 (2016)
    High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings
    Si Xinchun1、2、*, Tang Yan1, Hu Song1, Liu Junbo1、2, Cheng Yiguang1、2, Hu Tao1, Zhou Yi1、2, and Deng Qinyuan1、2
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  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/aos201636.0105003 Cite this Article Set citation alerts
    Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 105003 Copy Citation Text show less
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    Article index updated: May. 18, 2024
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    Si Xinchun, Tang Yan, Hu Song, Liu Junbo, Cheng Yiguang, Hu Tao, Zhou Yi, Deng Qinyuan. High-Precision Alignment Technique with Large Measurement Range Based on Composite Gratings[J]. Acta Optica Sinica, 2016, 36(1): 105003
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