• Chinese Optics Letters
  • Vol. 16, Issue 5, 050007 (2018)
Mohammad Alavirad1、2, Anthony Olivieri2, Langis Roy3, and Pierre Berini2、4、5、*
Author Affiliations
  • 1Department of Electronics, Carleton University, 1125 Colonel By Drive, Ottawa, Ontario K1S 5B6, Canada
  • 2Centre for Research in Photonics, University of Ottawa, 25 Templeton Street, Ottawa, Ontario K1N 6N5, Canada
  • 3Department of Electrical, Computer and Software Engineering, University of Ontario Institute of Technology, 2000 Simcoe Street North Oshawa, Ontario L1H 7K4, Canada
  • 4School of Electrical Engineering and Computer Science, University of Ottawa, 800 King Edward Avenue, Ottawa, Ontario K1N 6N5, Canada
  • 5Department of Physics, University of Ottawa, 150 Louis Pasteur, Ottawa, Ontario K1N 6N5, Canada
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    DOI: 10.3788/COL201816.050007 Cite this Article Set citation alerts
    Mohammad Alavirad, Anthony Olivieri, Langis Roy, Pierre Berini. Fabrication of electrically contacted plasmonic Schottky nanoantennas on silicon[J]. Chinese Optics Letters, 2018, 16(5): 050007 Copy Citation Text show less

    Abstract

    We fabricate Schottky contact photodetectors based on electrically contacted Au nanoantennas on p-Si for the plasmonic detection of sub-bandgap photons in the optical communications wavelength range. Based on a physical model for the internal photoemission of hot carriers, photons coupled onto the Au nanoantennas excite resonant plasmons, which decay into energetic “hot” holes emitted over the Schottky barrier at the Au/p-Si interface, resulting in a photocurrent. In our device, the active Schottky area consists of Au/p-Si contact and is very small, whereas the probing pad for external electrical interconnection is larger but consists of Au/Ti/p-Si contact having a comparatively higher Schottky barrier, thus producing negligible photo and dark currents. We describe fabrication that involves an electron-beam lithography step overlaid with photolithography. This highly compact component is very promising for applications in high-density Si photonics.
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    Mohammad Alavirad, Anthony Olivieri, Langis Roy, Pierre Berini. Fabrication of electrically contacted plasmonic Schottky nanoantennas on silicon[J]. Chinese Optics Letters, 2018, 16(5): 050007
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