Yaru JIN, Jiaxin YU. Fabrication of semiconductor field effect transistor based on a flexible stencil[J]. Optical Instruments, 2023, 45(1): 80
- Optical Instruments
- Vol. 45, Issue 1, 80 (2023)
Fig. 1. Geometric structure of stencil
Fig. 2. Schematic diagram of process flow of the device fabrication
Fig. 3. Schematic of CdSe nanobelts backgate field effect transistor
Fig. 4. Optical micrographs of channels with different sized stencil
Fig. 5. Optical micrographs of rigid shadow masked channels before and after metal deposition
Fig. 6. Optical micrographs of stenciled channels before and after treatment and CdSe nanobelts and PL spectra of CdSe nanobelts
Fig. 7. I -V characteristic curve of CdSe nanobelts backgate FET
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Table 1. Parameters of the electrode pattern
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