• Acta Optica Sinica
  • Vol. 31, Issue 1, 131003 (2011)
Liu Yunyan1、2、*, Cheng Chuanfu1, Song Hongsheng1, Zang Yongli2, and Yang Shanying1、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/aos201131.0131003 Cite this Article Set citation alerts
    Liu Yunyan, Cheng Chuanfu, Song Hongsheng, Zang Yongli, Yang Shanying. Morphology Analysis of ZnO:Ga Thin Films Deposited by Pulsed Laser Deposition[J]. Acta Optica Sinica, 2011, 31(1): 131003 Copy Citation Text show less

    Abstract

    The quantitative study on the film surface morphology is important for the understanding of thin film growth mechanism. The ZnO:Ga (GZO) transparent conductive film is prepared by pulsed laser deposition (PLD). Since this GZO film growth is far from equilibrium, the GZO film has self-affine fractal characteristics and can be described by height-height correlation function H (r, r+ρ). By using atomic force microscope to get the height data of the surface image, the quantitative analysis of height-height correlation function of the GZO film prepared by PLD is carried out. The values of the three important parameters W, ξ and α are measured and it is suggested that the growth of GZO thin film is consistent with Kuromoto-Sivashinsky growth model.
    Liu Yunyan, Cheng Chuanfu, Song Hongsheng, Zang Yongli, Yang Shanying. Morphology Analysis of ZnO:Ga Thin Films Deposited by Pulsed Laser Deposition[J]. Acta Optica Sinica, 2011, 31(1): 131003
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