Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Shuai Cui; Kaixiang Cao; Zhao Pan; Xiaoyan Gao; Yuan Yu; Xinliang Zhang

doi:10.1117/1.APN.2.4.046007

Journals >Advanced Photonics Nexus >Volume 2 >Issue 4 >Page 046007 > Article

Advanced Photonics Nexus
Vol. 2, Issue 4, 046007 (2023)

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Shuai Cui^1、2, Kaixiang Cao^1、2, Zhao Pan^1、2, Xiaoyan Gao^1、2, Yuan Yu^1、2、*, and Xinliang Zhang^1、2

Author Affiliations

¹Huazhong University of Science and Technology, School of Optical and Electronic Information, Wuhan National Laboratory for Optoelectronics, Wuhan, China

²Optics Valley Laboratory, Wuhan, China

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DOI: 10.1117/1.APN.2.4.046007 Cite this Article Set citation alerts

Shuai Cui, Kaixiang Cao, Zhao Pan, Xiaoyan Gao, Yuan Yu, Xinliang Zhang. Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide[J]. Advanced Photonics Nexus, 2023, 2(4): 046007 Copy Citation Text

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Schematic diagram of the proposed compact ultrahigh-Q MRR. (a) 3D view and (b) top view.

Fig. 1. Schematic diagram of the proposed compact ultrahigh-

Q

MRR. (a) 3D view and (b) top view.

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Fig. 2. Design of the compact ultrahigh-

Q

microracetrack resonator. (a) Cross section of the

{Si}_{3} N_{4}

optical waveguide of the resonator; (b) relationship between the scattering loss and the waveguide core width based on

n - w

model; (c), (d) simulated mode profiles when the waveguide widths are 1 and

3 μ m

, respectively; (e), (f) calculated respective MERs of the higher-order TE modes excited by

{TE}_{0}

mode and MERs of the higher-order TM modes excited by

{TM}_{0}

mode, in the waveguide consisting of an input MSW, a 180 deg Euler MWB, and an output MSW, when

R_{\min} = 100 μ m

R_{\max} = 4000 μ m

; (g) simulated

{TE}_{0}

mode propagation in the designed 180 deg Euler MWBs; (h) simulated

{TE}_{0}

mode profile at the input (top), the quadrant MRR (

R = R_{\min}

) (middle), and the output (bottom) of the 180 deg Euler MWBs; and (i) FDTD simulations of the light coupling in the MSW DC.

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Fig. 3. False color images of the fabricated ultrahigh-

Q

{Si}_{3} N_{4}

racetrack resonator. (a) Global view of the fabricated device; (b) modified Euler bend; (c) adiabatic taper; and (d) coupling waveguides of DC.

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Fig. 4. Experimental setup for characterizing the

Q

factor of the compact ultrahigh-

Q

{Si}_{3} N_{4}

racetrack resonator based on VNA.

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Fig. 5. Measured results of the MRR (height

0.8 μ m

× width

3.0 μ m

). (a) Measured transmission of the resonator when TE and TM mode resonances exist; (b) measured transmission spectrum when only TE mode resonance exists; (c) histogram of intrinsic linewidth of the MRRs; and (d) representative resonance with critical coupling.

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Reference	( $W_{co} \times H$ ) ( $μ m$ )	Manufacturing process	Propagation loss (dB/m)	$R / R_{eff}$ (mm)	$Q$ (loaded)	$Q$ (intrinsic)
2014²⁰	11.0 × 0.04	H-A-R	0.32	9.65	$4.2 \times 10^{7}$	$8.1 \times 10^{7}$
2021³⁶	8.0 × 0.10	H-A-R	0.1	0.95	$1.50 \times 10^{8}$	$2.2 \times 10^{8}$
2021¹⁸	11.0 × 0.04	H-A-R	0.06	11.787	$2.11 \times 10^{8}$	$4.22 \times 10^{8}$
2020²⁵	2.1 × 0.95	Photonic Damascene process	1.4	2.3	—	$2.3 \times 10^{7}$
2021²⁷	2.2 × 0.95	Photonic Damascene process	1.0	—	—	$3.0 \times 10^{7}$
2022¹¹	2.2 × 0.95	Photonic Damascene process	2.4	—	—	$1.3 \times 10^{7}$
2021¹⁹	2.6 × 0.73	Subtractive process	<1	0.147	—	$3.18 \times 10^{7}$
2021²⁸	1.9 × 0.74	Subtractive process	—	—	—	$1.9 \times 10^{7}$
2023¹⁰	2.4 × 0.81	Subtractive process	2.6	—	—	$1.4 \times 10^{7}$
2021³⁷	0.8 × 0.8	Standard LAT process	20	0.5	—	$2.0 \times 10^{6}$
This work	3.0 × 0.80	Standard LAT process	3.3	0.195	$6.7 \times 10^{6}$	$1.08 \times 10^{7}$