• Journal of Infrared and Millimeter Waves
  • Vol. 30, Issue 6, 495 (2011)
YE Zhen-Hua1、*, HUANG Jian1、2, YIN Wen-Ting1、2, HU Wei-Da1, FENG Jing-Wen1, CHEN Lu1, LIAO Qin-Jun1, CHEN Hong-Lei1, LIN Chun1, HU Xiao-Ning1, DING Rui-Jun1, and HE Li1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    YE Zhen-Hua, HUANG Jian, YIN Wen-Ting, HU Wei-Da, FENG Jing-Wen, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. HgCdTe photodiode arrays passivated by MBE in-situ grown CdTe film[J]. Journal of Infrared and Millimeter Waves, 2011, 30(6): 495 Copy Citation Text show less

    Abstract

    The results of HgCdTe long-wavelength infrared n+-on-p planar photodiode arrays passivated by molecular beam epitaxy (MBE) in-situ grown CdTe film were presented in this paper. By mercury-vacancy p-type annealing, ion-implantation window exposure, ZnS ion-implantation barrier layer deposition, B+-implantation, ion-implantation barrier layer removal, ZnS dielectric film deposition, metallization and indium-bump arrays fabrication, HgCdTe long-wavelength infrared n+-on-p planar photodiode arrays using in-situ CdTe passivation was achieved from a Hg1-xCdxTe film covered with a layer of MBE in-situ grown CdTe film. Zero bias dynamic resistances of HgCdTe photodiode arrays using in-situ CdTe passivation were improved 1~2 times higher than those of non-in-situ CdTe passivation processed one, and the maximum dynamic resistances near small reverse biases were even increased by a factor of 30~40. Since their current-voltage curves were all measured at 78K, it is obvious that in-situ CdTe passivation was beneficial to suppress dark current of n+-on-p planar photodiode by optimizing the interface between the HgCdTe detector and CdTe passivation layer, and then to enhance the performance of long-wavelength infrared photodiode arrays operating at small reverse biases.
    YE Zhen-Hua, HUANG Jian, YIN Wen-Ting, HU Wei-Da, FENG Jing-Wen, CHEN Lu, LIAO Qin-Jun, CHEN Hong-Lei, LIN Chun, HU Xiao-Ning, DING Rui-Jun, HE Li. HgCdTe photodiode arrays passivated by MBE in-situ grown CdTe film[J]. Journal of Infrared and Millimeter Waves, 2011, 30(6): 495
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