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Journals >Acta Optica Sinica >Volume 39 >Issue 10 >Page 1012001 > Article

Acta Optica Sinica
Vol. 39, Issue 10, 1012001 (2019)

Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry

Mengqi Han and Wenjing Chen^*

Author Affiliations

Department of Optoelectronic Science and Technology, College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610064, China

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DOI: 10.3788/AOS201939.1012001 Cite this Article Set citation alerts

Mengqi Han, Wenjing Chen. Improving Measurement Accuracy of Two-Dimensional S-Transform Profilometry[J]. Acta Optica Sinica, 2019, 39(10): 1012001 Copy Citation Text

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References

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