• Laser & Optoelectronics Progress
  • Vol. 57, Issue 14, 140001 (2020)
Hanyu Lü1, Jing Zou1、2、*, Jintao Zhao1, and Xiaodong Hu1、2
Author Affiliations
  • 1State Key Laboratory of Precision Testing Techniques and Instrument, School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Nanchang Institute for Microtechnology of Tianjin University, Tianjin 300072, China
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    DOI: 10.3788/LOP57.140001 Cite this Article Set citation alerts
    Hanyu Lü, Jing Zou, Jintao Zhao, Xiaodong Hu. Review on Development of Nano-Computed Tomography Imaging Technology[J]. Laser & Optoelectronics Progress, 2020, 57(14): 140001 Copy Citation Text show less
    Principle of projection magnification imaging
    Fig. 1. Principle of projection magnification imaging
    Schematic diagram of nano-CT imaging using modified SEM device[9]. (a) Optical path diagram of X-ray point source projection magnification; (b) main structure and components of modified SEM for obtaining nano-light source; (c) geometric principle of cone-beam CT imaging system; (d) virtual cross section of tomographic dataset
    Fig. 2. Schematic diagram of nano-CT imaging using modified SEM device[9]. (a) Optical path diagram of X-ray point source projection magnification; (b) main structure and components of modified SEM for obtaining nano-light source; (c) geometric principle of cone-beam CT imaging system; (d) virtual cross section of tomographic dataset
    Structural diagram of coupling of fiber and detector[27]
    Fig. 3. Structural diagram of coupling of fiber and detector[27]
    Structural diagram of coupling of lens and detector[29]
    Fig. 4. Structural diagram of coupling of lens and detector[29]
    Comparison of optical microscope and X-ray microscope. (a) Imaging schematic of visible light microscope; (b) imaging schematic of soft X-ray microscopy; (c) imaging schematic of hard X-ray microscope
    Fig. 5. Comparison of optical microscope and X-ray microscope. (a) Imaging schematic of visible light microscope; (b) imaging schematic of soft X-ray microscopy; (c) imaging schematic of hard X-ray microscope
    X-ray nano CT imaging system with zone plate[39]
    Fig. 6. X-ray nano CT imaging system with zone plate[39]
    Structural diagram of zone plate. (a) Structural diagram of classical zone plate; (b) structural diagram of multilayer film Laue mirror[48]
    Fig. 7. Structural diagram of zone plate. (a) Structural diagram of classical zone plate; (b) structural diagram of multilayer film Laue mirror[48]
    Structural diagram of composite lens. (a) Planar composite refractive lens; (b) spherical composite refractive lens[91]
    Fig. 8. Structural diagram of composite lens. (a) Planar composite refractive lens; (b) spherical composite refractive lens[91]
    Schematic diagram of elliptical type Bragg amplifier[95]
    Fig. 9. Schematic diagram of elliptical type Bragg amplifier[95]
    Diagram of structure of X-ray Bragg amplifier[96]
    Fig. 10. Diagram of structure of X-ray Bragg amplifier[96]
    Schematic diagram of capillary focusing
    Fig. 11. Schematic diagram of capillary focusing
    Single capillary focusing diagram (left) and multi-capillary focusing diagram (right)
    Fig. 12. Single capillary focusing diagram (left) and multi-capillary focusing diagram (right)
    PrincipleType
    Imaging principleAbsorbing contrast based nano-CT
    Phase contrast based nano-CT
    Property of X-rayHard X-ray nano-CT
    Soft X-ray nano-CT
    AmplificationmechanismProjection magnifying nano-CT
    X-ray microscopy nano-CT
    Table 1. Classification of nano-CT imaging systems
    CategoryComponentBeam diameter /nmEnergy /keVEfficiency /%Ref. No
    DiffractingFresnel zone plates35810-70[24,38-45]
    Multilayer zone plates513.810-20[13,46-47]
    Multilayer Laue lenses1014.610-30[48-54]
    AbsorbingPinholes/slits100011[55-56]
    ReflectingCapillaries50880[12,57-59]
    Waveguides1015<25[25,60]
    Kirkpatrick-Baez mirrors720>50[52,61-63]
    RefractingSpherical compound refractive lenses10008several 10%[11, 63-64]
    Parabolic compound refractive lenses5021>60[26,65-70]
    Kinoform lenses1008>50[71-72]
    Table 2. Classification and important parameters of common X-ray focusing components
    Hanyu Lü, Jing Zou, Jintao Zhao, Xiaodong Hu. Review on Development of Nano-Computed Tomography Imaging Technology[J]. Laser & Optoelectronics Progress, 2020, 57(14): 140001
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