• Infrared and Laser Engineering
  • Vol. 48, Issue 3, 317002 (2019)
Liu Qian, He Jianguo, and Yue Xiaobin
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/irla201948.0317002 Cite this Article
    Liu Qian, He Jianguo, Yue Xiaobin. Sinusoidal phase-shifting interferometry with arbitrary sinusoidal modulation for wavefront measurement[J]. Infrared and Laser Engineering, 2019, 48(3): 317002 Copy Citation Text show less
    References

    [1] Wang Xiaokun. Fabrication and testing of an off-axis aspheric surface with abnormal shape [J]. Infrared and Laser Engineering, 2014, 43(9): 2959-2963. (in Chinese)

    [2] Zhang Liqiong, Wang Shaopu, Hu Yao, et al. Retrace error elimination for partial compensation digital Moire phase shifting interferometry[J]. Infrared and Laser Engineering, 2018, 47(1): 0117005. (in Chinese)

    [3] Han Zhigang, Chen Lei. Eight-step phase shifting algorithm for broadband light interferometry insensitive to envelop variation and phase shifting error[J]. Infrared and Laser Engineering, 2015, 44(4): 1236-1242. (in Chinese)

    [4] Wu Ting, Zou Yan, Li Zhitong, et al. Novel approach for high-precision measurement of micre refractive index difference of two transparent mediums[J]. Infrared and Laser Engineering, 2017, 46(4): 0417005. (in Chinese)

    [5] Bruning J H, Herriott D R, Gallagher J E, et al. Digital wavefront measuring interferometer for testing optical surfaces and lenses [J]. Applied Optics, 1974, 13(11): 2693-2703.

    [6] Deng Yong, Liu Ning, Cao Hongbei, et al. Nd:YAG laser feedback interference effects based PZT precision measurement technology and system[J]. Infrared and Laser Engineering, 2014, 43(10): 3434-3438 (in Chinese)

    [7] Liu Q, Yue X, Li L, et al. Robust phase-shifting interferometry resistant to multiple disturbances[J]. Journal of Optics, 2018, 20(4): 045701.

    [8] Sun Qinyuan, Chen Lei, Zheng Donghui, et al. Dynamic Fizeau interferometer using low-coherence light source[J]. Infrared and Laser Engineering, 2018, 47(2): 0220001. (in Chinese)

    [9] Sasaki O, Okazaki H. Sinusoidal phase modulating interferometry for surface profile measurement [J]. Applied Optics, 1986, 25(18): 3137-3140.

    [10] He Guotian, Wang Xiangchao, Zeng Aijun. Real-time surface profile measurement using sinusoidal phase-modulating interferometry [J]. Acta Optica Sinica, 2007, 27(11): 1997-2002. (in Chinese)

    [11] Sasaki O, Xin J, Choi S, et al. Profile measurement of thin films by backpropagation of multiple-wavelength optical fields with two sinusoidal phase-modulating interferometers [J]. Optics Communications, 2015, 356: 578-581.

    [12] Feng F, Duan F J, Bo E, et al. Surface profile measuring system based on fringe projection and sinusoidal phase modulation [J]. Infrared and Laser Engineering, 2015, 44(12): 3762-3768.

    [13] Lv C, Duan F, Fu X, et al. Three-dimensional shape measurement with sinusoidal phase-modulating fiber-optic interferometer fringe[J]. Optical Fiber Technology, 2016, 29: 20-27.

    [14] Sasaki O, Okazaki H. Analysis of measurement accuracy in sinusoidal phase modulating interferometry[J]. Applied Optics, 1986, 25(18): 3152-3158.

    [15] De Groot P. Design of error-compensating algorithms for sinusoidal phase shifting interferometry[J]. Applied Optics, 2009, 48(35): 6788-6796.

    Liu Qian, He Jianguo, Yue Xiaobin. Sinusoidal phase-shifting interferometry with arbitrary sinusoidal modulation for wavefront measurement[J]. Infrared and Laser Engineering, 2019, 48(3): 317002
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