[1] J. Wei. Laser Heat-Mode Lithography: Principle and Methods(2019).
[2] A. S. Basu, S. McNamara, Y. B. Gianchandani. Scanning thermal lithography: maskless, submicron thermochemical patterning of photoresist by ultracompliant probes. J. Vac. Sci. Technol. B, 22, 3217(2004).
[3] W. C. Tian, Y. H. Ho, C. H. Chen, C. Y. Kuo. Sensing performance of precisely ordered TiO2 nanowire gas sensors fabricated by electron-beam lithography. Sensors, 13, 865(2013).
[4] S. Wang, Z. Zhou, B. Li, C. Wang, Q. Liu. Progresses on new generation laser direct writing technique. Mater. Today Nano, 16, 100142(2021).
[5] J. Chen, G. Chen, Q. Zhan. Self-aligned fiber-based dual-beam source for STED nanolithography. Chin. Opt. Lett., 19, 072201(2021).
[6] T. Yang, H. Lin, B. Jia. Ultrafast direct laser writing of 2D materials for multifunctional photonics devices [Invited]. Chin. Opt. Lett., 18, 023601(2020).
[7] T. Jiang, S. Gao, Z. Tian, H. Zhang, L. Niu. Fabrication of diamond ultra-fine structures by femtosecond laser. Chin. Opt. Lett., 18, 101402(2020).
[8] Y. Usami, T. Watanabe, Y. Kanazawa, K. Taga, H. Kawai, K. Ichikawa. 405 nm laser thermal lithography of 40 nm pattern using super resolution organic resist material. Appl. Phys. Express, 2, 126502(2009).
[9] B. J. Zeng, J. Z. Huang, R. W. Ni, N. N. Yu, W. Wei, Y. Z. Hu, Z. Li, X. S. Miao. Metallic resist for phase-change lithography. Sci. Rep., 4, 5300(2014).
[10] T. Luo, Z. Li, Q. He, X. Miao. Pr-based metallic glass films used as resist for phase-change lithography. Opt. Express, 24, 5754(2016).
[11] H. Xi, Q. Liu, Y. Tian, Y. Wang, S. Guo, M. Chu. Ge2Sb1.5Bi0.5Te5 thin film as inorganic photoresist. Opt. Mater. Express, 2, 461(2012).
[12] H. Xi, Q. Liu, Y. Tian, S. Guo, M. Cu, G. Zhang. The study on SiO2 pattern fabrication using Ge1.5Sn0.5Sb2Te5 as resists. J. Nanosci. Nanotechnol., 13, 829(2013).
[13] Y. Meng, J. K. Behera, Z. Wang, J. Zheng, J. Wei, L. Wu, Y. Wang. Nanostructure patterning of C-Sb2Te3 by maskless thermal lithography using femtosecond laser pulses. Appl. Surf. Sci., 508, 145228(2020).
[14] J. Wei, K. Zhang, T. Wei, Y. Wang, Y. Wu, M. Xiao. High-speed maskless nanolithography with visible light based on photothermal localization. Sci. Rep., 7, 43892(2017).
[15] Z. Wang, J. Zheng, G. Chen, K. Zhang, T. Wei, Y. Wang, X. Liu, Z. Mo, T. Gao, M. Wen, J. Wei. Laser-assisted thermal exposure lithography: arbitrary feature sizes. Adv. Eng. Mater., 23, 2001468(2021).
[16] K. Zhang, Z. Wang, G. Chen, J. Zheng, Z. Mo, Y. Wang, J. Wei. Laser heat-mode patterning with improved aspect-ratio. Mat. Sci. Semicon. Proc., 134, 106018(2021).
[17] G. Chen, J. Zheng, Z. Wang, K. Zhang, Z. Mo, X. Liu, T. Gao, Y. Wang, J. Wei. Fabrication of micro/nano multifunctional patterns on optical glass through chalcogenide heat-mode resist AgInSbTe. J. Alloys Compd., 867, 158988(2021).
[18] Y. Q. Huang, R. Huang, Q. L. Liu, C. C. Zheng, J. Q. Ning, Y. Peng, Z. Y. Zhang. Realization of III-V semiconductor periodic nanostructures by laser direct writing technique. Nanoscale Res. Lett., 12, 12(2017).
[19] Z. Wang, K. Zhang, G. Chen, Z. Zhu, Y. Wang, J. Wei. A metal lift-off process through hyperbolic undercut of laser heat-mode lithography. Mater. Lett., 264, 127344(2020).
[20] T. Wei, B. Liu, W. Li, Y. Ling, J. Hu, Q. Liu, M. Cheng, J. Wei. CrSb2Te thin film as a dry resist and its etching mechanism for lithography application. Mater. Chem. Phys., 266, 124558(2021).
[21] T. Wei, J. Wei, Y. Wang, L. Zhang. Manipulation and simulations of thermal field profiles in laser heat-mode lithography. J. Appl. Phys., 122, 223107(2017).
[22] J. H. Han, K.-S. Jeong, M. Ahn, D.-H. Lim, W. J. Yang, S. Jong Park, M.-H. Cho. Modulation of phase change characteristics in Ag-incorporated Ge2Sb2Te5 owing to changes in structural distortion and bond strength. J. Mater. Chem. C, 5, 3973(2017).
[23] S. Hwang, H. Park, D. Kim, H. Lim, C. Lee, J. H. Han, Y.-K. Kwon, M.-H. Cho. Ultra-low energy phase change memory with improved thermal stability by tailoring the local structure through Ag doping. ACS Appl. Mater. Inter., 12, 37285(2020).
[24] T. Wei, Q. Wang, S. Song, Z. Song, B. Liu. Reversible phase-change characteristics and structural origin in Cr doped Ge2Sb2Te5 thin films. Thin Solid Films, 716, 138434(2020).