[1] Detlev Ristau, Tobias Gross. Ion beam sputter coatings for laser technology[C]//SPIE, 2005, 5963: 596313.
[2] Yoon S G, Kanga S M, Junga W S, et al. Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering[J]. Thin Solid Films, 2008, 516(11): 3582-3585.
[3] Demiryont H, Sites J R, Geib K. Effects of oxygen content on the optical properties of tantalum oxide films deposited by ion-beam sputtering [J]. Applied Optics, 1985, 24(4):490-495.
[4] Yoon S G, Kang S M, Yoon D H. Post-annealing effects on the structural properties and residual stress of Ta2O5 thin films deposited by ion beam sputtering [J]. Journal of Optoelectronics & Advanced Materials, 2007, 9(5): 1246-1249.
[5] Masse J P, Szymanowski H, Zabeida O, et al. Stability and effect of annealing on the optical properties of plasma-deposited Ta2O5, and Nb2O5, films [J]. Thin Solid Films, 2006, 515(4): 1674-1682.
[6] Chandra S V J, Rao G M, Uthanna S. Heat treatment induced structural and optical properties of rf magnetron sputtered tantalum oxide films [J]. Crystal Research & Technology, 2007, 42(3): 290-294.
[8] Ferlauto A S, Ferreira G M, Pearce J M, et al. Analytical model for the optical functions of amorphous semiconductors from the near infrared to ultraviolet: Applications in thin film photovoltaics[J]. Journal of Applied Physics, 2002, 92(5): 2424-2436.
[9] Liu Huasong, Ji Yiqin, Zhang Feng, et al. Dispersive properties of optical constants of some metallic oxide thin films in the near infrared regions [J]. Acta Optica Sinica, 2014, 34(8): 0831003. (in Chinese)
[10] Ji Yiqin, Jiang Yugang, Liu Huasong, et al. Analysis on effects of thermal treatment on structural characteristic of ion beam sputtering SiO2 films[J]. Infrared and Laser Engineering, 2013, 42(2): 418-422. (in Chinese)
[11] Bright T J, Watjen J I, Zhang Z M, et al. Infrared optical properties of amorphous and nanocrystalline Ta2O5 thin films [J]. Journal of Applied Physics, 2013, 114(8): 083515.
[12] Klemberg-Sapieha J E, Oberste-Berghaus J, Martinu L, et al. Mechanical characteristics of optical coatings prepared by various techniques: a comparative study.[J]. Applied Optics, 2004, 43(13): 2670-2679.