• Opto-Electronic Engineering
  • Vol. 46, Issue 12, 180507 (2019)
Fan Zhentao1、2、3, Tang Yuanyuan1、2、*, Wei Kai1、2, Chen Ying4, and Zhang Yudong1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    DOI: 10.12086/oee.2019.180507 Cite this Article
    Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507 Copy Citation Text show less
    References

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    [10] Fan Z T, Tang Y Y, Wei K, et al. Calibration of focusing lens artifacts in a dual rotating-compensator Mueller matrix ellipsometer[J]. Applied Optics, 2018, 57(15): 4145–4152.

    [11] Li J J, Sun X B, Kang Q, et al. Polarization detection accuracy analysis of spectropolarimeter[J]. Infrared and Laser Engineering, 2018, 47(1): 0123002.

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    [16] Yao B X, Rao C H, Gu N T. Polarization calibration unit design of 1.8 m Chinese large solar telescope[J]. Opto-Electronic Engineering, 2018, 45(11): 180058.

    [17] Song G Z, Liu T, Chen Y Q, et al. Calibration of spectroscopic ellipsometer using multiple standard samples[J]. Acta Optica Sinica, 2014, 34(3): 0312003.

    Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507
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