• Journal of Infrared and Millimeter Waves
  • Vol. 37, Issue 2, 140 (2018)
LI Huan1、2、*, YANG Cheng-Ao2、3, XIE Sheng-Wen2、3, HUANG Shu-Shan2、3, CHAI Xiao-Li2、3, ZHANG Yu2、3, WAGN Jin-Liang1, and NIU Zhi-Chuan2、3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.11972/j.issn.1001-9014.2018.02.003 Cite this Article
    LI Huan, YANG Cheng-Ao, XIE Sheng-Wen, HUANG Shu-Shan, CHAI Xiao-Li, ZHANG Yu, WAGN Jin-Liang, NIU Zhi-Chuan. Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching[J]. Journal of Infrared and Millimeter Waves, 2018, 37(2): 140 Copy Citation Text show less

    Abstract

    GaSb-based laterally coupled distributed feedback (LC-DFB) quantum well lasers with a wavelength of 2 μm were successfully prepared. Second order Bragg gratings are fabricated by holographic lithography and inductively coupled plasma etching (ICP). The etching conditions for grating preparation are optimized and a single longitudinal mode lasing at room temperature is obtained. The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.
    LI Huan, YANG Cheng-Ao, XIE Sheng-Wen, HUANG Shu-Shan, CHAI Xiao-Li, ZHANG Yu, WAGN Jin-Liang, NIU Zhi-Chuan. Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching[J]. Journal of Infrared and Millimeter Waves, 2018, 37(2): 140
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