1Wuhan National Laboratory for Optoelectronics, College of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
2Faculty of Mechanical and Electronic Information, China University of Geosciences, Wuhan 430074, China
3State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing 100871, China
4School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA
Wenqin Mo, Huaming Wu, Dingshan Gao, Zhiping Zhou. A novel accelerometer based on microring resonator[J]. Chinese Optics Letters, 2009, 7(9): 798
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A novel microring resonator accelerometer is proposed. It is realized by a suspended straight waveguide coupled with a microring resonator. Under the external acceleration, the coupling coefficient is a function of gap spacing between the two waveguides. The mathematical model of the sensing element is established. Both the finite element method and coupled mode theory are adopted to analyze and optimize the proposed structure. Simulation results show that the mechanical sensitivity is 0.015 \mu m/g with the working frequency below 500 Hz and cross-axis sensitivity less than 0.001%, which is promising in seismic related applications.