Chao PANG, Chang-Ling YAN, Jing-Hang YANG, Ran QIAN, Yi-Fei LI. A novel ring-shaped top-DBR etched microstructure VCSEL with a hollow beam[J]. Journal of Infrared and Millimeter Waves, 2023, 42(4): 462

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- Journal of Infrared and Millimeter Waves
- Vol. 42, Issue 4, 462 (2023)

Fig. 1. Structure schematic of the ring-shaped top-DBR etched microstructure VCSEL

Fig. 2. Calculated intensity profiles of different mode numbers (n) of ring-shaped top-DBR etched microstructure VCSEL obtained by FDTD: (a) n=1, (b) n=5, (c) n=9, (d) n=13

Fig. 3. Injection depth as a function of injection power(Down-right inset:SEM image of the central etched area)

Fig. 4. Microscope image of the fabricated ring-shaped top-DBR etched microstructure VCSEL

Fig. 5. The near-field pattern of the ring-shaped top-DBR etched microstructure VCSEL

Fig. 6. Light output power and voltage as a function of injection current of the ring-shaped top-DBR etched microstructure VCSEL

Fig. 7. The light spectrum of the ring-shaped top-DBR etched microstructure VCSEL at different injection currents: (a) 0.3 A, (b) 1.2 A

Fig. 8. The light intensity distribution curves of the ring-shaped top-DBR etched microstructure VCSEL in vertical and parallel directions

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