With the unique advantages of high processing accuracy, high efficiency, no pollution, and wide range of application materials, laser processing has become the first choice for micro-hole fabrication, especially in the processing of high-quality micro-holes. The advantages and research significance of laser processing micro-holes are introduced. The quality characteristics of laser processing micro-holes (such as depth-diameter ratio, taper, roundness, and recast layer) are summarized. The current research status of micro-hole quality of laser processing is reviewed and discussed. The impact of drilling methods, laser process parameters (such as pulse width, wavelength, and repetition frequency), and processing environment (such as vacuum, gas, and liquid) on the quality of laser processing micro-holes and the reasons for the impact are discussed. The development direction of laser processing of micro-holes and the focus of future research are summarized.