Fig. 1. Different relaxation channels for energy transfer during binary collisions of molecules^[79]

Fig. 2. Commonly used experimental setup for pyrolysis LCVD

Fig. 3. (a) Plot of three regimes for incubation, nucleation and coalescence of W deposited at 2.44 W; (b) Thickness of W films deposited on glass substrates plotted as a function of deposition time; (c) Surface morphology of deposited W films deposited at different laser power^[81]

Fig. 4. SEM images of diamond grown on tungsten surface of (a) poorly and (b) heavily nucleated^[96]

Fig. 5. (a) XRD patterns of the β-SiC films prepared at different laser power, deposition pressure and deposition temperature; (b) Effects of laser power and deposition pressure on preferred crystalline orientations of β-SiC films^[97]

Fig. 6. (a) Surface and (b) cross-sectional SEM images of HfO₂ films prepared using conventional CVD at 1173 K, (c), (e) surface and the corresponding (d), (f) cross-sectional SEM images of (c), (d) HfO₂ films prepared at 1203 K and (e), (f) HfO₂ films prepared at 1383 K by pyrolysis CVD, effect of deposition temperature on deposition rate, crystallite size, and morphological evolution in HfO₂ films prepared using (g) conventional CVD and (h) pyrolysis CVD^[71]

Fig. 7. Surface and cross‐sectional SEM images of the SrTiO₃ films prepared at 760 K (a, b) , 957 K (c, d) and 1104 K (e, f) with a laser power of 150 W, respectively; (g) Influences of the deposition temperature on thickness, grains size, grains shape, and preferred orientation of the SrTiO₃ films^[128]

Fig. 8. (a), (b) TEM observations and (c) atomic configuration of the nanoforest-like 3C-SiC/graphene composite films deposited at 1523 K and 400 Pa, (d) schematic illustration and (e) cycling performance of 3C-SiC/graphene nanoforest composite films with stable framework and continuous electron pathways^[136]

Fig. 9. Commonly used experimental setup and principle of photolysis LCVD

Fig. 10. SEM photographs and corresponding 3D images of the deposited tungsten patterns for various laser power. (a) 0.21 mW; (b) 0.249 mW; (c) 0.468 mW; (d) 0.607 mW; (e) Variation of electrical resistivity of the deposit tungsten with respect to laser power; (f) Example of the tungsten interconnect deposited by LCVD for thin film transistor-liquid crystal display circuit repair^[150]

Fig. 11. (a) Surface and cross-sectional SEM images of diamond films prepared at different laser energy densities; 　　　　　(b) The reaction process diagram of active species in the combustion flame under the ultraviolet light irradiation^[61]

Fig. 12. Surface image surface and cross-sectional SEM images of TiN_x films prepared at T_pre = 423 K with varied laser power. (a) P_L =50 W; (b) P_L =100 W; (c) P_L =150 W; (d) P_L =200 W, effects of T_pre and P_L on (e) the deposition rate and (f) the deposition temperature of TiN_x films^[170]

Fig. 13. Si₃N₄ film prepared by LVCD. (a) Precursor gas ratio and (b) RF power with different laser photolysis condition ^[176]

Fig. 14. Commonly used experimental setup for laser resonant excitation LCVD

Fig. 15. The influence of laser resonant excitation on CVD of carbon nano-onions. (a)~(c) Photographs of ethylene–oxygen flames; (d)~(f) High-resolution TEM images of CNOs, showing their atomic-level microstructure; (g), (h) Raman spectra and its fitting curve of CNOs^[180]

Fig. 16. BDD prepared using resonant excitation LCVD method and their electrochemical performance in glucose tests. (a) SEM images of BDD films prepared at different laser power; (b) Schematic illustration of glucose detection setup; (c) CV scans; (d) Ampere scanning; (e) Potential window; (f) Nyquist plots^[43]

Fig. 17. (a, b) Cross-sectional SEM images of GaN films and (c, d) XRD patterns of GaN grown at different temperature in LMOCVD and conventional MOCVD process, respectively^[54]

Fig. 18. (a) Experimental setup for the CO₂ laser-assisted CCVD and (b) optical emission spectra and (c) mole fractions of the species of NH₃/C₂H₂/O₂ flames under different laser excitations measured using mass spectrometer^[181]; (d) Optical images of C₂H₄/C₂H₂/O₂ flames^[184]

Table 1. Comparison of various CVD techniques

Table 2. Commonly used laser sources for LCVD

Table 3. Recent reports of thin film deposition using pyrolysis LCVD

Table 4. Reports of thin film deposition using photolysis LCVD recently