[1] D. A. B. Miller. Rationale and challenges for optical interconnects to electronic chips. Proc. IEEE, 88, 728-749(2000).
[2] R. Soref. Silicon photonics: a review of recent literature. Silicon, 2, 1-6(2010).
[3] B. G. Lee, X. Chen, A. Biberman, X. Liu, I.-W. Hsieh, C.-Y. Chou, J. I. Dadap, F. Xia, W. M. J. Green, L. Sekaric, Y. A. Vlasov, R. M. Osgood, K. Bergman. Ultrahigh-bandwidth silicon photonic nanowire waveguides for on-chip networks. IEEE Photon. Technol. Lett., 20, 398-400(2008).
[4] D. A. B. Miller. Attojoule optoelectronics for low-energy information processing and communications. J. Lightwave Technol., 35, 346-396(2017).
[5] R. A. Soref, B. R. Bennett. Electrooptical effects in silicon. IEEE J. Quantum Electron., 23, 123-129(1987).
[6] W. M. Green, M. J. Rooks, L. Sekaric, Y. A. Vlasov. Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator. Opt. Express, 15, 17106-17113(2007).
[7] Q. Xu, B. Schmidt, S. Pradhan, M. Lipson. Micrometre-scale silicon electro-optic modulator. Nature, 435, 325-327(2005).
[8] K. Debnath, L. O’Faolain, F. Y. Gardes, A. G. Steffan, G. T. Reed, T. F. Krauss. Cascaded modulator architecture for WDM applications. Opt. Express, 20, 27420-27428(2012).
[9] K. Preston, S. Manipatruni, A. Gondarenko, C. B. Poitras, M. Lipson. Deposited silicon high-speed integrated electro-optic modulator. Opt. Express, 17, 5118-5124(2009).
[10] X. Xiao, M. Li, L. Wang, D. Chen, Q. Yang, S. Yu. High speed silicon photonic modulators. Optical Fiber Communications Conference and Exhibition (OFC), 1-3(2017).
[11] D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, G. T. Reed. High contrast 40 Gbit/s optical modulation in silicon. Opt. Express, 19, 11507-11516(2011).
[12] D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, G. T. Reed. 50 Gbit/s silicon optical modulator. IEEE Photon. Technol. Lett., 24, 234-236(2012).
[13] G. T. Reed, G. Mashanovich, F. Y. Gardes, D. J. Thomson. Silicon optical modulators. Nat. Photonics, 4, 518-526(2010).
[14] M. Webster, P. Gothoskar, V. Patel, D. Piede, S. Anderson, R. Tummidi, D. Adams, C. Appel, P. Metz, S. Sunder, B. Dama, K. Shastri. An efficient MOS-capacitor based silicon modulator and CMOS drivers for optical transmitters. IEEE 11th International Conference on Group IV Photonics (GFP), 1-2(2014).
[15] A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, M. Paniccia. A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor. Nature, 427, 615-618(2004).
[16] J. Fujikata, S. Takahashi, M. Takahashi, M. Noguchi, T. Nakamura, Y. Arakawa. High-performance MOS-capacitor-type Si optical modulator and surface-illumination-type Ge photodetector for optical interconnection. Jpn. J. Appl. Phys., 55, 04EC01(2016).
[17] M. Sodagar, A. H. Hosseinnia, P. Isautier, H. Moradinejad, S. Ralph, A. A. Eftekhar, A. Adibi. Compact, 15 Gb/s electro-optic modulator through carrier accumulation in a hybrid Si/SiO2/Si microdisk. Opt. Express, 23, 28306-28315(2015).
[18] J. H. Han, F. Boeuf, J. Fujikata, S. Takahashi, S. Takagi, M. Takenaka. Efficient low-loss InGaAsP/Si hybrid MOS optical modulator. Nat. Photonics, 11, 486-490(2017).
[19] T. Hiraki, T. Aihara, K. Hasebe, K. Takeda, T. Fujii, T. Kakitsuka, T. Tsuchizawa, H. Fukuda, S. Matsuo. Heterogeneously integrated III-V/Si MOS capacitor Mach-Zehnder modulator. Nat. Photonics, 11, 482-485(2017).
[20] M. Douix, D. Marris-Morini, C. Baudot, S. Crémer, D. Rideau, D. Perez-Galacho, A. Souhaite, R. Blanc, E. Batail, N. Vulliet, L. Vivien, E. Cassan, F. Boeuf. Design of integrated capacitive modulators for 56 Gbps operation. IEEE 13th International Conference on Group IV Photonics (GFP), 5-7(2016).
[21] A. Abraham, O. Dubray, S. Olivier, D. Marrls-Morini, S. Menezo, L. Vivien. Low-voltage and low-loss silicon modulator based on carrier accumulation using a vertical slot waveguide. IEEE 14th International Conference on Group IV Photonics (GFP), 118-119(2016).
[22] D. Perez-Galacho, A. Abraham, S. Olivier, L. Vivien, D. Marris-Morini. Silicon modulator based on interleaved capacitors in subwavelength grating waveguides. Proc. SPIE, 9891, 989112(2016).
[23] K. Debnath, A. Z. Khokhar, G. T. Reed, S. Saito. Fabrication of arbitrarily narrow vertical dielectric slots in silicon waveguides. IEEE Photon. Technol. Lett., 29, 1269-1272(2017).