Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring

Ci Song; Ye Tian; Feng Shi; Kun Zhang; Yongxiang Shen

doi:10.3788/AOS202040.1222001

Journals >Acta Optica Sinica >Volume 40 >Issue 12 >Page 1222001 > Article

Acta Optica Sinica
Vol. 40, Issue 12, 1222001 (2020)

Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring

Ci Song^{1、2、3、*}, Ye Tian^1、2、3, Feng Shi^1、2、3, Kun Zhang^1、2、3, and Yongxiang Shen^1、2、3

Author Affiliations

¹College of Intelligent Science and Technology, National University of Defense Technology, Changsha, Hunan 410073, China

²Hunan Provincial Key Laboratory of Ultra-Precision Machining Technology, Changsha, Hunan 410073 China

³Laboratory of Science and Technology on Integrated Logistics Support, Changsha, Hunan 410073, China

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DOI: 10.3788/AOS202040.1222001 Cite this Article Set citation alerts

Ci Song, Ye Tian, Feng Shi, Kun Zhang, Yongxiang Shen. Process Optimization for Cylindrical Single-Crystal Silicon Mirror with a Tilted Incident Ion Beam Figuring[J]. Acta Optica Sinica, 2020, 40(12): 1222001 Copy Citation Text

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