Min Fu, Fan Chen, Ge Zhu, Hailin Shi, Xiaobo Wei, Junhong Qiao, Congyang Leng. High-Precision Angular Displacement Measurement Based on Rotating Optical Field[J]. Acta Optica Sinica, 2021, 41(18): 1812001
- Acta Optica Sinica
- Vol. 41, Issue 18, 1812001 (2021)
Fig. 1. Construction principle of rotating light field. (a) Schematic diagram of spatial modulation of light intensity; (b) composite diagram of traveling wave signal
Fig. 2. Sensor output signal processing diagram
Fig. 3. Experimental platform. (a) Test platform; (b) detail of sensor prototype
Fig. 4. Experimental results of standing wave signal and traveling wave signal. (a) Standing wave signal; (b) traveling wave signal
Fig. 5. Experimental results. (a) Intra-level measurement error and harmonic component; (b) whole circle error curve
Fig. 6. Grid layout mode. (a) Whole circle uniform layout; (b) non-circular uniform layout
Fig. 7. Models of grid surface of moving disk and fixing disk. (a) 18 pairs; (b) 90 pairs
Fig. 8. Photoelectric signals, traveling wave signals and error frequency figures. (a) 18 pairs; (b) 90 pairs
Fig. 9. Physical drawing of 90 pairs of grid surfaces and experimental results. (a) Physical drawing; (b) intra-level measurement error and harmonic component
Fig. 10. Whole period error curves. (a) Whole circle uniform layout; (b) non-circular uniform layout
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Table 1. Comparison of measuring errors of three different angular displacement measurement devices
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