• Journal of Infrared and Millimeter Waves
  • Vol. 41, Issue 3, 534 (2022)
Li-Hua LI*, Bo-Jun XIONG, Chao-Wei YANG, Xiong-Jun LI, Zhi-Yuan WAN, Peng ZHAO, and Xiang-Yun LIU
Author Affiliations
  • Kunming Institute of Physics,Kunming 650223
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    DOI: 10.11972/j.issn.1001-9014.2022.03.002 Cite this Article
    Li-Hua LI, Bo-Jun XIONG, Chao-Wei YANG, Xiong-Jun LI, Zhi-Yuan WAN, Peng ZHAO, Xiang-Yun LIU. Research on p-on-n LWIR and VLWIR HgCdTe infrared focal plane detectors technology[J]. Journal of Infrared and Millimeter Waves, 2022, 41(3): 534 Copy Citation Text show less
    VGpol-Vs curves of three devices in Set 1~Set 3
    Fig. 1. VGpol-Vs curves of three devices in Set 1~Set 3
    Set 1~Set 3 focal plane device responsivity (top) and blind pixel distribution map (bottom)
    Fig. 2. Set 1~Set 3 focal plane device responsivity (top) and blind pixel distribution map (bottom)
    The noise signal distribution diagram of Set 1~Set 3 (Set 1~Set 3 from left to right)
    Fig. 3. The noise signal distribution diagram of Set 1~Set 3 (Set 1~Set 3 from left to right)
    NETD histogram of focal plane devices in Set 1~Set 3 and Infrared image(Set 3)
    Fig. 4. NETD histogram of focal plane devices in Set 1~Set 3 and Infrared image(Set 3)
    The relationship between R0A product and wavelength under different processes
    Fig. 5. The relationship between R0A product and wavelength under different processes
    参数读出电路
    工艺CMOS 0.35 μm
    面阵尺寸640×512
    像元间距25 μm
    输入极性p-on-n
    电容/电荷存储能力4.17 pC/26 Me-
    读出模式快摄模式、ITR
    帧频≤200 Hz
    动态范围3.2 V
    Table 1. ROIC parameters
    参数器件
    Set 1Set 2Set 3
    截止波长9.5 μm10.1 μm14.97 μm
    工作温度77 K77 K71 K
    视场角(FOV)F2F2F2
    电容值4.17 pC4.17 pC4.17 pC
    Table 2. focal plane device parameters and test parameter settings
    参数器件
    Set 1Set 2Set 3
    有效像元率99.90%99.78%99.82%
    峰值探测率

    2.10e+11

    (cm.Hz1/2)/w

    1.61e+11

    (cm.Hz1/2)/w

    1.20e+11

    (cm.Hz1/2)/w

    Table 3. Test results of three focal plane devices with different wavelengths
    参数器件
    Set 1Set 2Set 3
    截止波长9.5 μm10.1 μm14.97 μm
    暗电流40.28 pA58.8 pA26.21 nA
    NETD15.2 mK18.2 mK20.2 mK
    噪声0.506 mV0.527 mV0.408 mV
    有效像元率99.90%99.78%99.82%
    R0A1030.48(Ω·cm2705.92(Ω·cm21.46(Ω·cm2
    Table 4. Test results of three focal plane devices with different wavelengths
    Li-Hua LI, Bo-Jun XIONG, Chao-Wei YANG, Xiong-Jun LI, Zhi-Yuan WAN, Peng ZHAO, Xiang-Yun LIU. Research on p-on-n LWIR and VLWIR HgCdTe infrared focal plane detectors technology[J]. Journal of Infrared and Millimeter Waves, 2022, 41(3): 534
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