• Acta Optica Sinica
  • Vol. 41, Issue 5, 0522001 (2021)
Yang Zhao, Yang Xiang*, and Tingting Li
Author Affiliations
  • School of Photoelectric Engineering, Changchun University of Science and Technology, Changchun, Jilin 130022, China
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    DOI: 10.3788/AOS202141.0522001 Cite this Article Set citation alerts
    Yang Zhao, Yang Xiang, Tingting Li. Optical Design of Deep Ultraviolet Laser Irradiation System for Accelerating Material Aging[J]. Acta Optica Sinica, 2021, 41(5): 0522001 Copy Citation Text show less
    References

    [1] Lin J X, Dong L S, Fan T A et al. Fast extreme ultraviolet lithography mask near-field calculation method based on machine learning[J]. Applied Optics, 59, 2829-2838(2020).

    [2] Bonakdar A, Rezaei M, Brown R L et al. Deep-UV microsphere projection lithography[J]. Optics Letters, 40, 2537-2540(2015).

    [3] Zhang L J, Qi Y J, Zhang L Y et al. Research on intellectual property strategy of lithography equipment[J]. Science Technology and Industry, 19, 106-112(2019).

    [4] Levinson H J. Principles of lithography[M]. 2 nd ed. Bellingham: SPIE(2005).

    [5] Ming R F, Wei Y Y, Dong L S. Influence of optical system aberration on critical dimension of EUV lithography imaging[J]. Acta Optica Sinica, 39, 1222001(2019).

    [6] Yin C, Li Y Q, Yan X et al. Tolerance analysis of micromirror array in deep ultraviolet lithography illumination system[J]. Acta Optica Sinica, 40, 0722001(2020).

    [7] Zhang L C, Zhao L, Cai X K et al. -01-21(2015).

    [8] Liberman V, Palmacci S, Geurtsen G P et al. High fluence testing of optical materials for 193-nm lithography extensions applications[J]. Proceedings of SPIE, 7640, 76402Z(2010). http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=756681

    [9] Oliker V, Doskolovich L L, Bykov D A. Beam shaping with a Plano-freeform lens pair[J]. Optics Express, 26, 19406-19419(2018). http://www.osapublishing.org/oe/abstract.cfm?uri=oe-26-15-19406

    [10] Yang Z K, Ma X H, Fang J Y et al. Tunable bottle beam of semiconductor laser[J]. Chinese Journal of Lasers, 45, 1105001(2018).

    [11] Pan Y S. Laser beam shaping using aspheric optical system[D]. Dalian: Dalian University of Technology(2010).

    [12] Roy Frieden B. Lossless conversion of a plane laser wave to a plane wave of uniform irradiance[J]. Applied Optics, 4, 1400-1403(1965). http://www.opticsinfobase.org/abstract.cfm?id=13958

    [13] Shi G Y. Gaussian beam shaping based on aspheric cylindrical lens[D]. Tianjin: Tianjin University of Technology(2014).

    [14] Wang P F, Xiang Y, Gao J et al. Design of collimating and beam expanding laser system[J]. Acta Optica Sinica, 35, 0922007(2015).

    [15] Zhu K J, Shi S, Chen Z G et al. Prediction of Profile Deviation during Glass Molding of Double-Aspheric Lens[J]. Journal of Engineering Science and Technology Review, 13, 50-56(2020).

    [16] Bian Y Y, Liu Y J, Liu B K et al. Contact lens for controlling myopia progression and correcting myopia and astigmatism[J]. Acta Optica Sinica, 40, 0422001(2020).

    [17] Jia M, Xue C X. Design of dual-band infrared optical system with Q-type asphere[J]. Acta Optica Sinica, 39, 1022001(2019).

    [18] Sun Y B. Research of beam homogenizing technology for diode laser[D]. Beijing: University of Chinese Academy of Sciences(2019).

    [19] Chen H D, Xue C X. Design of mid-wave infrared optical system with high variable ratio miniaturization[J]. Acta Optica Sinica, 40, 0222001(2020).

    [20] Ge J Q, Qin Y X, Liu X D et al. Design of variable spot and zoom optical system for laser cutting[J]. Acta Optica Sinica, 39, 0222001(2019).

    Yang Zhao, Yang Xiang, Tingting Li. Optical Design of Deep Ultraviolet Laser Irradiation System for Accelerating Material Aging[J]. Acta Optica Sinica, 2021, 41(5): 0522001
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