Yang Zhao, Yang Xiang, Tingting Li. Optical Design of Deep Ultraviolet Laser Irradiation System for Accelerating Material Aging[J]. Acta Optica Sinica, 2021, 41(5): 0522001
- Acta Optica Sinica
- Vol. 41, Issue 5, 0522001 (2021)
Fig. 1. Shaping process of aspheric cylindrical lens in vertical direction
Fig. 2. Schematic of afocal zoom system. (a) Focal fixation system; (b) zoom system
Fig. 3. System for accelerating material aging by laser irradiation. (a) Beam shaping system; (b) variable bunching system; (c) test lens
Fig. 4. Shaping effect of Gaussian beam in vertical direction
Fig. 5. Beam uniformity at different positions of distance shaping system
Fig. 6. Illumination distribution before and after beam shaping. (a) Before shaping; (b) after shaping
Fig. 7. Structure diagram of variable magnification and reduction beam system
Fig. 8. Light traces of variable magnification and reduction beam system under different magnifications. (a) 0.2×; (b) 0.3×; (c) 0.4×; (d) 0.5×
Fig. 9. Wave aberration of variable magnification and reduction beam system under different magnifications. (a) 0.2×; (b) 0.3×; (c) 0.4×; (d) 0.5×
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Table 1. System parameters
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Table 2. Optical parameters of aspheric cylindrical lens
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Table 3. Tolerance parameters of optical system
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