• Laser & Optoelectronics Progress
  • Vol. 59, Issue 19, 1900003 (2022)
Qiang Huang1、2, Yi Zhang1, Junqiang Sun1、*, Changliang Yu3, Jianfeng Gao1, Peilin Jiang1, Haotian Shi1, and Chukun Huang1
Author Affiliations
  • 1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, Hubei, China
  • 2Hunan Provincial Key Laboratory of Grids Operation and Control on Multi-Power Sources Area, School of Electrical Engineering, Shaoyang University, Shaoyang 422000, Hunan, China
  • 3Wuhan Fisilink Microelectronics Technology Co., Ltd., Wuhan 430040, Hubei, China
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    DOI: 10.3788/LOP202259.1900003 Cite this Article Set citation alerts
    Qiang Huang, Yi Zhang, Junqiang Sun, Changliang Yu, Jianfeng Gao, Peilin Jiang, Haotian Shi, Chukun Huang. Research Progress on Ge/SiGe Multiple Quantum Well Optical Modulators[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900003 Copy Citation Text show less

    Abstract

    Silicon-based photonic integration technology has made breakthroughs in several fields, but the silicon germanium material system is currently the only material that can realize all silicon-based integrated active devices and is compatible with complementary metal oxide semiconductor processes. Ge/SiGe multiple quantum wells as silicon-based optical modulators can realize short-distance optical interconnections on silicon chips, and Ge/SiGe multiple quantum well modulators based on the quantum-confined Stark effect have the advantages of low power consumption, low bias voltage, and high speed. This paper summarizes the research status and progress of Ge/SiGe-based multiple quantum well modulators. The extinction ratio, optical loss, bias voltage, electric field, modulation bandwidth, dark current, and other performance parameters of Ge/SiGe multiple quantum well modulators are discussed and compared. The development direction and challenges of Ge/SiGe multiple quantum well modulators in integrated photonics are evaluated.
    Qiang Huang, Yi Zhang, Junqiang Sun, Changliang Yu, Jianfeng Gao, Peilin Jiang, Haotian Shi, Chukun Huang. Research Progress on Ge/SiGe Multiple Quantum Well Optical Modulators[J]. Laser & Optoelectronics Progress, 2022, 59(19): 1900003
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