• Acta Photonica Sinica
  • Vol. 50, Issue 1, 156 (2021)
Lujie WU1、3, Qingtao WEN1、3, Yazeng GAO1、2、5, Weier LU1、2、5, Yang XIA1、2、5, Yanli LI4, Xiangdong KONG2、4, and Li HAN2、4
Author Affiliations
  • 1Instrument and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing00029, China
  • 2University of Chinese Academy of Sciences, Beijing101407, China
  • 3School of Science, Beijing Jiaotong University, Beijing100044, China
  • 4Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing100080, China
  • 5Beijing Engineering Research Center for Microelectronics Preparation Equipment, Beijing100029, China
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    DOI: 10.3788/gzxb20215001.0123001 Cite this Article
    Lujie WU, Qingtao WEN, Yazeng GAO, Weier LU, Yang XIA, Yanli LI, Xiangdong KONG, Li HAN. Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology[J]. Acta Photonica Sinica, 2021, 50(1): 156 Copy Citation Text show less
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    Lujie WU, Qingtao WEN, Yazeng GAO, Weier LU, Yang XIA, Yanli LI, Xiangdong KONG, Li HAN. Investigation on the Preparation of High Precision Multilayer X-ray Fresnel Zone Plates Based on Atomic Layer Deposition Technology[J]. Acta Photonica Sinica, 2021, 50(1): 156
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