[1] Zhang Shizhou, Gao Wei, Ma Junshan. Ultra-precision measurement and control of rolling of stage. J. Japan Prec. Engng., 1999, 65(1):100～105

[2] Huang P S, Ni J. On-line error compensation of coordinate measuring machines. J. Mach. Tools Manufact., 1995, 35(5):725～730

[3] Nakayabu T, Mori H, Takita A et al.. Development of a practical measurement system for rolling by means of laser interferometry. J. Japan Prec. Engng., 1995, 61(2):253～257

[4] Okuyama E, Moritoki H. Influence of the difference of characteristics between sensor to the roundness measurement based on 3-point method. J. Japan Prec. Engng., 1999, 65(3):447～451

[5] Kiyono S, Zhang Shizhou, Uda Y. Self-calibration of precision angle sensor and polygon mirror. Measurement., 1997, 21(4):125～136