• Acta Optica Sinica
  • Vol. 20, Issue 10, 1403 (2000)
[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Optical Precision Measurement Technique of Rolling Error[J]. Acta Optica Sinica, 2000, 20(10): 1403 Copy Citation Text show less

    Abstract

    A new method to measure rolling of a precision stage using the two-point method is presented. The rolling of stage and the rolling angle profile can be separated from each other by using the angle sensor output data. Experimental results showed that the rolling can be measured to 0.05" determined by the stability of the rolling measurement system.
    [in Chinese], [in Chinese], [in Chinese]. Optical Precision Measurement Technique of Rolling Error[J]. Acta Optica Sinica, 2000, 20(10): 1403
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