A Novel Real-Time Etching Depth Testing System for Micro-Fabrication

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 17 >Issue 6 >Page 745 > Article

Acta Optica Sinica
Vol. 17, Issue 6, 745 (1997)

A Novel Real-Time Etching Depth Testing System for Micro-Fabrication

[in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Novel Real-Time Etching Depth Testing System for Micro-Fabrication[J]. Acta Optica Sinica, 1997, 17(6): 745 Copy Citation Text

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References

[4] P. Lolodner, A. Katzir, N. Hartsough. End-point detection and etch-rate measurement during reactive ion etching using flourescent polymerfilms. J. Vacuum Sci. & Technol., 1983, B1(2): 50～61

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Novel Real-Time Etching Depth Testing System for Micro-Fabrication[J]. Acta Optica Sinica, 1997, 17(6): 745

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