Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang. Groove Profile Prediction of Grating Masks in Scanning Beam Interference Lithography[J]. Acta Optica Sinica, 2018, 38(5): 0505001
- Acta Optica Sinica
- Vol. 38, Issue 5, 0505001 (2018)
Fig. 1. Schematic of SBIL
Fig. 2. Schematic of light wave propagating in photoresist layer
Fig. 3. Normalized exposure within photoresist
Fig. 4. Schematic of FMM
Fig. 5. Profile evolution curves under influence of standing wave effect
Fig. 6. Reflectivity versus thickness of ARC
Fig. 7. Profile evolution curves after elimination of standing wave effect
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Table 1. Simulation parameters
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