[1] Zhu Z D[J]. 3D-measurement of micro structure of surface and the application in manufacture Modular Machine Tool & Automatic Manufacturing Technique, 2010, 61-65.
[4] Liu G M, Yu X C, Ren H X et al. Three-dimensional shape measurement method based on laser shearing interference[J]. Laser & Infrared, 48, 464-468(2018).
[6] Dan D, Lei M, Yao B L et al. DMD-based LED-illumination super-resolution and optical sectioning microscopy[J]. Scientific Reports, 3, 1116(2013).
[7] Liu Z Q, Yi D R, Kong L H et al. Research on the structured light illumination parallel object-side differential rapid measurement method[J]. Chinese Journal of Scientific Instrument, 38, 2987-2993(2017).
[8] He B F, Ding S Y, Wei C E et al. Review of measurement methods for areal surface roughness[J]. Optics and Precision Engineering, 27, 78-93(2019).
[9] Zhao W Q, Jiang Q, Qiu L R et al. Dual-axes differential confocal microscopy with high axial resolution and long working distance[J]. Optics Communications, 284, 15-19(2011).
[10] Liu Z Q, Yi D R, Kong L H et al. Object-side based differential axial measurement based on parallel confocal microscopy[J]. Optics and Precision Engineering, 25, 1449-1457(2017).
[11] Liu J, Tan J B, Bin H et al. Improved differential confocal microscopy with ultrahigh signal-to-noise ratio and reflectance disturbance resistibility[J]. Applied Optics, 48, 6195-6201(2009).
[12] Zhao C G. Research on confocal simultaneous phase-shifting interference imaging microscopy[D]. Harbin: Harbin Institute of Technology, 45-63(2011).
[13] Tan J, Wang F. Theoretical analysis and property study of optical focus detection based on differential confocal microscopy[J]. Measurement Science and Technology, 13, 1289-1293(2002).