Xingxing Zhu, Dingrong Yi, Yiqing Ye, Linhua Kong, Zhiqun Liu. High-Precision Three-Dimensional Shape Measurement Based on Anti-Interference Parallel Object-Side Differential Axial[J]. Acta Optica Sinica, 2020, 40(4): 0412001
- Acta Optica Sinica
- Vol. 40, Issue 4, 0412001 (2020)
Fig. 1. Principle illustration of parallel object-side differential axial measurement method
Fig. 2. Experimental setup of the parallel object-side differential axial measurement method
Fig. 3. Calibration curve of axial measurement
Fig. 4. Coin surface morphology is affected by disturbance error. (a) Uneven illumination; (b) effect of coin surface reduction by uneven illumination
Fig. 5. Logarithmic differential confocal microscopy calibration curve of axial measurement
Fig. 6. Experimental sample STEP-Si-5-1 and measurement position
Fig. 7. Photo of a dime as the second experimental sample
Fig. 8. Measurement images of coin surface morphology by the proposed method. (a) MF; (b) MA; (c) MS; (d) MX; (e) MJF; (f) MJA
Fig. 9. Reduction result of coin surface morphology after error compensation
Fig. 10. Reduction of coin surface morphology. (a) Before error compensation; (b) after error compensation
Fig. 11. Height measurement curve of optical surface profilometer. (a) Two-dimensional section view of sample height; (b) top view of three-dimensional height profile of the sample
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Table 1. Measurement results of step sample in STEP-Si-5-1
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