To meet with the ongoing demand for the development of higher performance space remote sensing instruments, a series of progress in short wavelength infrared InGaAs focal plane arrays (FPAs) has been achieved in Shanghai Institute of Technical Physics. Through the continuous research efforts devoted to the low-defect density epitaxial materials, the FPA processing technologies as well as the low noise read-out circuits, a 10-μm-pitch 1~1.7 μm InGaAs FPA with an array format up to 2560×2048, a pixel operability up to 99.7% and a high peak detectivity up to 1.1×10¹³ cmHz^1/2/W is realized. A 15-μm-pitch 1~2.5 μm extended wavelength InGaAs FPA with an array format of 1280×1024 and a high peak detectivity up to 5.0×10¹¹ cmHz^1/2/W is also achieved. New principle FPA detectors are also developed, which are a monolithic integrated four-direction polarized 160×128 InGaAs FPA with a high extinction ratio up to 37:1, and a 64×64 InGaAs Geiger-mode avalanche FPA with a fine timing resolution down to 0.8 ns.